Facultatea de Fizică
Universitatea "Al.I.Cuza" Iaşi
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| Titlu: Studiul depunerilor metalice cu ajutorul microscopiei de forţă atomică |
| Autori: A. V. Năstuţă, G. B. Rusu, V. Tiron, G. Popa |
| Afiliere: Universitatea „Al. I. Cuza“, Facultatea de Fizică, 700506 Iaşi |
| Abstract: In the present paper the surface morphology of Ti and TiN sputtered films are studied. The sample surface was
analyzed by Atomic Force Microscopy (AFM). The AFM technique reveals significant modifications of surface roughness
between the Ti and TiN sputter deposited films. For the same current intensity the roughness value of Ti film is, in all
studied cases, major than TiN film roughness. A shift of the maximum density onto lower radius values can be observed
for TiN films compared with Ti films, for all value of the current discharge. |
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