Facultatea de Fizică
Universitatea "Al.I.Cuza" Iaşi
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| Titlu: Determination of electron energy distribution function using electrical probe measurements |
| Autori: I. Burducea, G. Popa |
| Afiliere: Department of Physics, Al. I. Cuza University, 11 Bv. Carol I, 700506 Iasi , Romania |
| Abstract: The electron energy distribution function (EEDF) was determined for a magnetically
multipolar confined argon plasma discharge, using Druyvensteyn’s method. The probe currentvoltage
characteristics were taken with an automatic data acquisition system and then the second
derivative was computed for each probe characteristic. EEDF was calculated for a gas pressure
range between 7.5 × 10 4
and 3.4 × 10 3
Torr and a constant anodecathode
discharge voltage of 100
V. The obtained results show that the EEDF is strongly dependent on the gas pressure.
Simultaneously with the increase of the pressure a shift of the EEDF maximum can be observed.
The EEDF is not Maxwellian but can be obtained as a superposition of velocity distribution
functions for two electron populations having different temperatures. |
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